Fluence (ions cm^-2)	Oxygen Concentration (%)	Silicon Concentration (%)	Magnesium Concentration (%)	Carbon Concentration (%)	Iron Concentration (%)
0	51.40768	12.78878	20.00978	13.77098	2.02278
5.18112E15	55.76474	14.68835	23.06964	4.09255	2.38472
1.03622E16	55.91312	15.24658	23.10739	3.30819	2.42473
2.07245E16	56.62895	15.54273	22.73268	2.86301	2.23263
4.1449E16	57.14123	16.14699	22.49996	2.40589	1.80593
8.28979E16	57.36026	17.12039	22.63477	1.429	1.45559
1.65796E17	55.89005	17.14178	23.18871	2.24549	1.53397
3.10867E17	55.56567	17.04178	23.58687	2.30657	1.49912
